If it's as you said, then in the FlexIO column of the AWIC's wake-up sources in Table 8-5, VLPS should be added like for some other modules, but it's not. So I believe that the OFF state in Table 39-4 is as described in Table 39-3 (Module and clock sources are disabled.). I have verified that other modules, such as (EWM), are OFF under VLPS, and do not generate interrupts after entering VLPS without refreshing the configuration. In summary, I still believe that according to the manual, FLEXIO should not work under VLPS, but my tests show otherwise. I confirmed that the MCU indeed entered VLPS mode through the following three points: 1. The bus clock was turned off (observed with an oscilloscope through clkout). 2. The CPU did not continue executing the program (this program referenced a demo program for mode conversion). 3. After waking up, the third bit of SMC->PMCTRL printed out was 0, indicating that the VLPS process was not aborted