Hi, @HarishCS
During Deep - power down ,RST as wakeup source what is the state of the Pins.
==> I think the Pins are powered off.
During Deep - power down ,IO as wakeup source what is the state of the Pins.
==> I think the Pins are powered off except the wakeup source IO.
And as I mentioned before, in our datasheet the Deep-power-down power consumption is only 250nA (0.25uA), but you tested is 2.6uA. So I think there should be some problem in your hardware side that your board is not totally enter deep-power-down mode.
Can you please remove SPI to test again? What else did you change on your board?
Firstly we have to confirm the Deep-power-down mode (with only RST as wakeup source) has correct power consumption.
Then we continue to check the Deep-power-Down-IO mode.
Best regards,
Christine.