Hi,
you need to select Primary Count Source to be Peripheral clock, e.g.
ETIMER_1.CHANNEL[4].CTRL.B.PRISRC = 0x18;
If you want to have COMPx preloaded with COMPLDx then set the CCCTRL register
/* COMP1/COMP2 register is used when the counter is counting up.
Load COMP2 with CMPLD2 upon successful compare with the value in COMP2.
Load COMP1 with CMPLD1 upon successful compare with the value in COMP1. */
ETIMER_1.CHANNEL[4].CCCTRL.R = 0xA800;
BR, Petr